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Section:	Main.COATINGS.Chemical Vapor Deposition (CVD).Silicon-Nitrogen Phase Coatings.Precursor..Silicon Azides..HexaAzidoSilicate Salt..[(Ph3P)2N]2[Si(N3)6]. Synthesis..SiCl4+[(Ph3P)2N]N3+MeCN Reaction
Code:	37954
Product:	DE. H
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Fields of interest:	AUTHOR LITERATURE REF.
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