| PATENT ASSIGNEE'S COUNTRY | Taiwan |
| UPDATE | 04.00 |
| PATENT ASSIGNEE | United Microelectronics Corp |
| PATENT CLAIMS |
- Outer tube, which comprises a first end coupled to a pump & second opened end that can be sealed by door - Inner tube located inside outer tube comprising closed end near the pump, an opened end near the door, & at least 2 gas inlets near closed end Wherein the gas inlets allows desired gases to be flushed into inner tube from outside of the HOSINF |
| PATENT PHOTOCOPY | Available on request |
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