Main > COATINGS > Chemical Vapor Deposition (CVD) > Copper Coatings

Product USA. A

PATENT ASSIGNEE'S COUNTRY USA
UPDATE 08.00
PATENT ASSIGNEE Advanced Technology Materials
PATENT CLAIMS Cu precursor liquid compn
- Cu precursor
- At least one of water & a non-ligand organic hydrate
PATENT PHOTOCOPY Available on request

Want more information ?
Interested in the hidden information ?
Click here and do your request.


back