Main > ELECTRONICS. > Chemical Vapor Deposition > Bismuth > Ferroelectric Thin Film

Product USA. AI

PATENT ASSIGNEE'S COUNTRY USA
UPDATE 09.00
PATENT ASSIGNEE Advanced Technology Materials
Infineon Technologies Corp
PATENT CLAIMS Method comprising
- Simultaneously exposing an insulating portion & electrica
lly conductive portion of substrate member to CVD process
- During said process selectively CVD a Bi based ferrolectric
thin film on electrically conductive portion
PATENT PHOTOCOPY Available on request

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