Main > PHOTORESIST > Negative Photoresist > Poly(Imide) Compn

Product Japan. A

PATENT ASSIGNEE'S COUNTRY Japan
UPDATE 12.00
PATENT ASSIGNEE Asahi Kasei Kogyo KK
PATENT CLAIMS - Selecting Polymeric polyimide precursor which has an
amide bond d. = 1.5 - 2.42 mol/kg from the group of polyme
ric aromatic polyimide precursor of formula
-[-CO-C6H2(CO2-CH=CH2)2-CONH-Y-NH-]-; Y = structure
bonded to at least 2 substituents, wherein an aromatic ring
bonded to the NH substituent, or an aromatic ring adjacent
to the aromatic ring bonded to the NH substituent via an O
linker, is substituted with an electron-withdrawing group
lacking H that is selected from the group: alkylcarbonyl,
nitrile & arylsulfone
- Applying a film of a photosensitive compn, which comprises
the polymeric polyimide precursor, photo-polymn initiator
& solvent, & which at thickness of 10 micro.m, exhibits an
absorbance < 1.5 upon exposure to light of wavelength of
365 nm, to an article coverable by the film
- Exposing the applied film to i-line light
- Removing unexposed areas of the film with a developing
soln to form a pattern
- Heat-curing the resultant pattern
PATENT PHOTOCOPY Available on request

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