| PATENT ASSIGNEE'S COUNTRY | USA |
| UPDATE | 07.99 |
| PATENT ASSIGNEE | This data is not available for free |
| PATENT CLAIMS |
Claim 26: Photoresist compn prepn method - Prepg photoresist resin binder in solvent, binder compri sing phenolic polymer with acid labile groups - Without isolation of resin binder from solvent, adding photo active comp. to binder |
| PATENT PHOTOCOPY | Available on request |
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