| PATENT ASSIGNEE'S COUNTRY | USA |
| UPDATE | 06.99 |
| PATENT ASSIGNEE | Sandia (Albuquerque; N.Mex) |
| PATENT CLAIMS |
- Providing WF6 as W source - Providing Si/B precursor source - Providing N precursor source - Depositing by CVD using 3 precursors W-Si-N thin film |
| PATENT PHOTOCOPY | Available on request |
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