| PATENT ASSIGNEE'S COUNTRY | Japan |
| UPDATE | 10.99 |
| PATENT ASSIGNEE | Shin-Etsu Chemical |
| PATENT CLAIMS |
Chemically amplified compn comprising organic solvent, photoacid generator; an aromatic compd having -CH2-COOH group & base resin with MWw 3,000-300,000 & derived from - CH2=CH-C6H4-CH2-OMe (x units) - CH2=CH-C6H4-O-(Acid labile group) ( y units) - CH2=CH-C6H4-OH (z units) x/(x+y+z) & y/(x+y+z) < 0.5 & z/(x+y+z) = 0.4-0.9 |
| PATENT PHOTOCOPY | Available on request |
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