| PATENT ASSIGNEE'S COUNTRY | Japan |
| UPDATE | 02.00 |
| PATENT ASSIGNEE | Shin-Etsu Chemical |
| PATENT CLAIMS |
Chemically amplified compn comprising organic solvent, alkali soluble resin, photoacid generator & di- & triphenyl monoterpene hydrocarbon based dissolution rate inhibitor of formula - X-(C6H4-OH)2; X = Divalent monoterpene hydrocarbon group |
| PATENT PHOTOCOPY | Available on request |
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