Main > PHOTORESIST > Photoactive > Stable. Compn

Product USA. S

PATENT ASSIGNEE'S COUNTRY USA
UPDATE 08.99
PATENT ASSIGNEE Shipley
PATENT CLAIMS Thermodynamically stable mixt of photoactive compds that are multiesters of polyhydroxy phenols & a naphthoquinone diazide sulfonyl halide comprising
- Dissolving a phenol contg > 2 free -OH & o-naphthoquinone
diazide sulfonyl halide in aprotic solvent in presence of
strong base
- Reacting said phenol & halide until all halide is reacted
with phenol
- Adding a second reactant selected from: Naphthoquinone
diazide sulfonic acid ester of a phenol having ester groups
in amount differing from number on said multiester formed
by said reaction, an unesterified polyhydroxy phenol, a
non-light sensitive ester of a phenol & mixts. thereof
- Permitting the prodt to remain in said solvent for > 15 min
before recovering said photoactive compds
PATENT PHOTOCOPY Available on request

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