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Product Positive. USA. S

PATENT ASSIGNEE'S COUNTRY USA
PATENT ASSIGNEE Shipley
PATENT CLAIMS Image forming method
- Providing chemically amplified positive tone photoresist
comprising resin binder, photoacid generator & aliphatic
amine (not trialkylamine) having pKa < 9 & of sufficient basi
city to complex with acid generated by exposure of photore
sist to activating radiation
- Forming a layer of the photoresist on substrate, exposing
the photoresist layer to an image pattern of activating radia
tion to liberate acid in the exposed areas of said photore
sist layer & complex the same with the amine
- Heating exposed photoresist layer to T sufficient to liberate
a catalyzing amount of acid from the complex of acid &
amine to create areas of differential soly., within photoresist
layer & developing the heated exposed layer with a develo
per for the photoresist layer to form photoresist relief image
PATENT PHOTOCOPY Available on request

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